Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation

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Abstract

Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation

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Published

30-06-2005

Issue

Vol. 24 No. 1 (2005): June 2005

Section

Short Communication

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